2006 535D RPM fluctuation, vibrations of whole car

[mxmx]

Hi,
I have 2006 E60 535D. I have problem with RPM fluctuation. Also when I'm driving uphill and trying to keep constant speed 80-120 KM/h and low RPM, whole car is shaking. It looks like this:
https://youtu.be/ZHBs4I7CCwo
Sound at 0:30-0:34 is a vibration of a car.
Car is shaking only on low RPM (below 2000). RPM fluctuation happens sometimes up to 2500 RPM, in manual/sport mode too, but usually only when I'm trying to keep constant speed. When I'm accelerating hard, it don't happen.

I already swapped a complete gearbox and there was no difference. I checked EGR, regenerated turbo and it didn't fixed issue. I checked injectors on computer and all parameters were correct. I bought new air flow meter and drive shaft support, but still no difference.
Only issue on computer is glow plug module.

Do you have an idea how to fix this issue?