I truly doubt there is any reliable way to find exact numbers imported and numbers left. Mine is a Canadian market car (2001) I imported into the states in 2003. In Canada (actually the rest of the world) the 540 M-Sport was available from 2001 to 2003 (only the USA was restricted to 2003 production). They are definitely not rare...and market prices seem to show very little premium for them thus far. That might change in the future, but the changes were not so significant to make the really all that special.
Interesting fact...in Canada the 540 M-Sport received the M5 rear trunk spoiler as standard (In Canada they also offered 530 M-Sport). In Europe they also received M badged door rub strips, similar to the M5, but no "5", just the M and color bar. I liked them so much, I looked up the part number and purchased a set for my car to complete the look. In Europe, you could get the M-Sport package applied to the 525, 530 or 540 from 2001 to 2003.
2001 540 M-Sport (cdn), ST X (KW) coilovers, H&R 15mm spacers, Eibach anti roll bars (28mm/18mm), Beastpower rear antiroll bar brackets, M5 rear chassis reinforcements (traction rods), Strong Strut front upper strut bar, Dinan Stage 1 software, factory M-Audio subs, Bavsound speaker upgrade, Bluebus bluetooth integration, Stop Tech SS brake lines, ATE coated brake rotors, ATE ceramic brake pads.
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